Polyimide film based RF MEMS capacitive switches

A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ramadoss, R., Lee, S., Bright, V.M., Lee, Y.C., Gupta, K.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Assembly Biomembranes Coplanar waveguides Fabrication Low voltage Performance loss Polyimides Radio frequency Radiofrequency microelectromechanical systems Switches
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