Polyimide film based RF MEMS capacitive switches

Polyimide film based RF MEMS capacitive switches

A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide...

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Bibliographische Detailangaben
Hauptverfasser: Ramadoss, R., Lee, S., Bright, V.M., Lee, Y.C., Gupta, K.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Assembly
Biomembranes
Coplanar waveguides
Fabrication
Low voltage
Performance loss
Polyimides
Radio frequency
Radiofrequency microelectromechanical systems
Switches
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Beschreibung
Zusammenfassung:A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2002.1011882