Polyimide film based RF MEMS capacitive switches

Polyimide film based RF MEMS capacitive switches

A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Ramadoss, R., Lee, S., Bright, V.M., Lee, Y.C., Gupta, K.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Assembly
Biomembranes
Coplanar waveguides
Fabrication
Low voltage
Performance loss
Polyimides
Radio frequency
Radiofrequency microelectromechanical systems
Switches
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 1236 vol.2
container_issue
container_start_page 1233
container_title
container_volume 2
creator Ramadoss, R.
Lee, S.
Bright, V.M.
Lee, Y.C.
Gupta, K.C.
description A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.
doi_str_mv 10.1109/MWSYM.2002.1011882
format Conference Proceeding
fullrecord <record><control><sourceid>proquest_6IE</sourceid><recordid>TN_cdi_ieee_primary_1011882</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1011882</ieee_id><sourcerecordid>27644223</sourcerecordid><originalsourceid>FETCH-LOGICAL-i204t-a0f640e8140751ebef38bdecd747bbd61620023b19c18d07c51e5993f4666b5c3</originalsourceid><addsrcrecordid>eNotkE9Lw0AUxBf_gKX2C-glJ2-p7-1udrNHKa0KDYpV1FPY3bzgSmJjN1X67Y20w8BcfgzDMHaBMEUEc128rt6LKQfgUwTEPOdHbMQzrVLNUR2zidE5DBaaC2NO2AhQmlTJ7O2MTWL8hEEyAwNixOBx3exCGypK6tC0ibORquRpkRTzYpV421kf-vBDSfwNvf-geM5Oa9tEmhxyzF4W8-fZXbp8uL2f3SzTwEH2qYVaSaAcJegMyVEtcleRr7TUzlUK1f9-4dB4zCvQfoAyY0QtlVIu82LMrva93Wb9vaXYl22InprGftF6G0uulZSciwG83IOBiMpuE1q72ZWHY8QflI5S0g</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype><pqid>27644223</pqid></control><display><type>conference_proceeding</type><title>Polyimide film based RF MEMS capacitive switches</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Ramadoss, R. ; Lee, S. ; Bright, V.M. ; Lee, Y.C. ; Gupta, K.C.</creator><creatorcontrib>Ramadoss, R. ; Lee, S. ; Bright, V.M. ; Lee, Y.C. ; Gupta, K.C.</creatorcontrib><description>A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.</description><identifier>ISSN: 0149-645X</identifier><identifier>ISBN: 9780780372399</identifier><identifier>ISBN: 0780372395</identifier><identifier>EISSN: 2576-7216</identifier><identifier>DOI: 10.1109/MWSYM.2002.1011882</identifier><language>eng</language><publisher>IEEE</publisher><subject>Assembly ; Biomembranes ; Coplanar waveguides ; Fabrication ; Low voltage ; Performance loss ; Polyimides ; Radio frequency ; Radiofrequency microelectromechanical systems ; Switches</subject><ispartof>2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278), 2002, Vol.2, p.1233-1236 vol.2</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1011882$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,778,782,787,788,2054,4038,4039,27912,54907</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1011882$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Ramadoss, R.</creatorcontrib><creatorcontrib>Lee, S.</creatorcontrib><creatorcontrib>Bright, V.M.</creatorcontrib><creatorcontrib>Lee, Y.C.</creatorcontrib><creatorcontrib>Gupta, K.C.</creatorcontrib><title>Polyimide film based RF MEMS capacitive switches</title><title>2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278)</title><addtitle>MWSYM</addtitle><description>A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.</description><subject>Assembly</subject><subject>Biomembranes</subject><subject>Coplanar waveguides</subject><subject>Fabrication</subject><subject>Low voltage</subject><subject>Performance loss</subject><subject>Polyimides</subject><subject>Radio frequency</subject><subject>Radiofrequency microelectromechanical systems</subject><subject>Switches</subject><issn>0149-645X</issn><issn>2576-7216</issn><isbn>9780780372399</isbn><isbn>0780372395</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2002</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkE9Lw0AUxBf_gKX2C-glJ2-p7-1udrNHKa0KDYpV1FPY3bzgSmJjN1X67Y20w8BcfgzDMHaBMEUEc128rt6LKQfgUwTEPOdHbMQzrVLNUR2zidE5DBaaC2NO2AhQmlTJ7O2MTWL8hEEyAwNixOBx3exCGypK6tC0ibORquRpkRTzYpV421kf-vBDSfwNvf-geM5Oa9tEmhxyzF4W8-fZXbp8uL2f3SzTwEH2qYVaSaAcJegMyVEtcleRr7TUzlUK1f9-4dB4zCvQfoAyY0QtlVIu82LMrva93Wb9vaXYl22InprGftF6G0uulZSciwG83IOBiMpuE1q72ZWHY8QflI5S0g</recordid><startdate>2002</startdate><enddate>2002</enddate><creator>Ramadoss, R.</creator><creator>Lee, S.</creator><creator>Bright, V.M.</creator><creator>Lee, Y.C.</creator><creator>Gupta, K.C.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>2002</creationdate><title>Polyimide film based RF MEMS capacitive switches</title><author>Ramadoss, R. ; Lee, S. ; Bright, V.M. ; Lee, Y.C. ; Gupta, K.C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i204t-a0f640e8140751ebef38bdecd747bbd61620023b19c18d07c51e5993f4666b5c3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Assembly</topic><topic>Biomembranes</topic><topic>Coplanar waveguides</topic><topic>Fabrication</topic><topic>Low voltage</topic><topic>Performance loss</topic><topic>Polyimides</topic><topic>Radio frequency</topic><topic>Radiofrequency microelectromechanical systems</topic><topic>Switches</topic><toplevel>online_resources</toplevel><creatorcontrib>Ramadoss, R.</creatorcontrib><creatorcontrib>Lee, S.</creatorcontrib><creatorcontrib>Bright, V.M.</creatorcontrib><creatorcontrib>Lee, Y.C.</creatorcontrib><creatorcontrib>Gupta, K.C.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ramadoss, R.</au><au>Lee, S.</au><au>Bright, V.M.</au><au>Lee, Y.C.</au><au>Gupta, K.C.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Polyimide film based RF MEMS capacitive switches</atitle><btitle>2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278)</btitle><stitle>MWSYM</stitle><date>2002</date><risdate>2002</risdate><volume>2</volume><spage>1233</spage><epage>1236 vol.2</epage><pages>1233-1236 vol.2</pages><issn>0149-645X</issn><eissn>2576-7216</eissn><isbn>9780780372399</isbn><isbn>0780372395</isbn><abstract>A new type of RF MEMS capacitive switch using polyimide film as the structural membrane layer has been developed. The dimensions of these switches range from a few hundred microns to a few millimeters and are convenient for integration with printed antennas. Fabrication and assembly of the polyimide film based switches are discussed. Electromechanical switch designs with actuation voltages as low as 73 V are presented. RF performance of the shunt-mounted switches on a CPW line has been demonstrated in the L-band with an insertion loss of less than 0.32 dB.</abstract><pub>IEEE</pub><doi>10.1109/MWSYM.2002.1011882</doi><tpages>4</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0149-645X
ispartof 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278), 2002, Vol.2, p.1233-1236 vol.2
issn 0149-645X
2576-7216
language eng
recordid cdi_ieee_primary_1011882
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Assembly
Biomembranes
Coplanar waveguides
Fabrication
Low voltage
Performance loss
Polyimides
Radio frequency
Radiofrequency microelectromechanical systems
Switches
title Polyimide film based RF MEMS capacitive switches
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T00%3A17%3A53IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Polyimide%20film%20based%20RF%20MEMS%20capacitive%20switches&rft.btitle=2002%20IEEE%20MTT-S%20International%20Microwave%20Symposium%20Digest%20(Cat.%20No.02CH37278)&rft.au=Ramadoss,%20R.&rft.date=2002&rft.volume=2&rft.spage=1233&rft.epage=1236%20vol.2&rft.pages=1233-1236%20vol.2&rft.issn=0149-645X&rft.eissn=2576-7216&rft.isbn=9780780372399&rft.isbn_list=0780372395&rft_id=info:doi/10.1109/MWSYM.2002.1011882&rft_dat=%3Cproquest_6IE%3E27644223%3C/proquest_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=27644223&rft_id=info:pmid/&rft_ieee_id=1011882&rfr_iscdi=true