Silicon micromachined RF MEMS resonators

A new resonator concept based on a three dimensional (3D) high resistivity silicon substrate filled cavity resonators is investigated. Fabrication is done using micromachining technologies. Two types of resonators are investigated, an "open-end" patch resonator and a "short circuit vi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Strohm, K.M., Schmuckle, F.J., Schauwecker, B., Luy, J.-F., Heinrich, W.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Cavity resonators Circuit simulation Conductivity Fabrication Frequency measurement Micromachining Radiofrequency microelectromechanical systems Resonance Resonant frequency Silicon
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