Silicon micromachined RF MEMS resonators

Silicon micromachined RF MEMS resonators

A new resonator concept based on a three dimensional (3D) high resistivity silicon substrate filled cavity resonators is investigated. Fabrication is done using micromachining technologies. Two types of resonators are investigated, an "open-end" patch resonator and a "short circuit vi...

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Bibliographische Detailangaben
Hauptverfasser: Strohm, K.M., Schmuckle, F.J., Schauwecker, B., Luy, J.-F., Heinrich, W.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Cavity resonators
Circuit simulation
Conductivity
Fabrication
Frequency measurement
Micromachining
Radiofrequency microelectromechanical systems
Resonance
Resonant frequency
Silicon
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Beschreibung
Zusammenfassung:A new resonator concept based on a three dimensional (3D) high resistivity silicon substrate filled cavity resonators is investigated. Fabrication is done using micromachining technologies. Two types of resonators are investigated, an "open-end" patch resonator and a "short circuit via" resonator. Both types show good agreement in simulated and measured resonance frequencies (within 2%). However, measured quality factors (50-70) are still lower than the simulated values and theoretical expectations.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2002.1011873