Integrated microwave sensor for cavity-length measurement with sub-millimeter accuracy

A novel measurement procedure using microwaves is presented. The implemented sensor determines the length of a cylindrical cavity (e.g. hydraulic system) with sub-millimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavit...

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Bibliographische Detailangaben
Hauptverfasser:	Megej, A., Beilenhoff, K., Schussler, M., Ziroff, A., Mottet, B., Yilmazoglu, O., Mutamba, K., Hamann, C.D., Baican, R., Hartnagel, H.L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Cavity resonators Dielectric measurements Hydraulic systems Integrated circuit measurements Mechanical sensors Microwave measurements Microwave sensors Resonance Resonant frequency Sensor phenomena and characterization
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Beschreibung
Zusammenfassung:	A novel measurement procedure using microwaves is presented. The implemented sensor determines the length of a cylindrical cavity (e.g. hydraulic system) with sub-millimeter accuracy in real time. The principle of operation is based on the detection of the resonance-frequency distribution in a cavity resonator.
ISSN:	0149-645X 2576-7216
DOI:	10.1109/MWSYM.2002.1011703