Toggle-switch - a new type of RF MEMS switch for power applications

Toggle-switch - a new type of RF MEMS switch for power applications

A new type of RF MEMS switch for power applications using a push-pull concept is described. The switching element consist of a cantilever which is fixed by a suspension spring to the ground of the coplanar lines. The switching voltages are 30 V to close and 35 V to open. The switches exhibit low los...

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Bibliographische Detailangaben
Hauptverfasser: Schauwecker, B., Strohm, K.A., Simon, W., Mehner, J., Luy, J.-F.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Contacts
Dielectric substrates
Electrodes
Gold
Micromechanical devices
Radio frequency
Radiofrequency microelectromechanical systems
Springs
Switches
Voltage
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Beschreibung
Zusammenfassung:A new type of RF MEMS switch for power applications using a push-pull concept is described. The switching element consist of a cantilever which is fixed by a suspension spring to the ground of the coplanar lines. The switching voltages are 30 V to close and 35 V to open. The switches exhibit low loss (
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2002.1011597