Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices
This chapter contains sections titled: Introduction Diblock copolymer technology for nano-objects fabrication Chemical vapor deposition of nanodots and nanowires Integration of nanoobjects Conclusions
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| creator | Luryi, Serge Xu, Jimmy Zaslavsky, Alexander |
| description | This chapter contains sections titled: Introduction Diblock copolymer technology for nano-objects fabrication Chemical vapor deposition of nanodots and nanowires Integration of nanoobjects Conclusions |
| doi_str_mv | 10.1002/9780470649343.ch14 |
| format | Book Chapter |
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| identifier | ISBN: 0470551372 |
| ispartof | Future Trends in Microelectronics, 2010, p.183-190 |
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| language | eng |
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| source | O'Reilly Online Learning: Academic/Public Library Edition |
| subjects | chemical vapor deposition (CVD) diblock copolymer technology nanoelectronics devices Physics |
| title | Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices |
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