Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

This chapter contains sections titled: Introduction Diblock copolymer technology for nano-objects fabrication Chemical vapor deposition of nanodots and nanowires Integration of nanoobjects Conclusions

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Bibliographische Detailangaben
Hauptverfasser: Luryi, Serge, Xu, Jimmy, Zaslavsky, Alexander
Format: Buchkapitel
Sprache:eng
Schlagworte:
chemical vapor deposition (CVD)
diblock copolymer technology
nanoelectronics devices
Physics
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Zusammenfassung:This chapter contains sections titled: Introduction Diblock copolymer technology for nano-objects fabrication Chemical vapor deposition of nanodots and nanowires Integration of nanoobjects Conclusions
DOI:10.1002/9780470649343.ch14