在黃銅基板上電化學沉積ZnO薄膜之製程參數對微觀結構與壓電特性之影響

Due to the severe environmental pollution and shortage of energy resources, the development of green energy has emerged drastically. In this study, the low-cost and low-pollution electrochemical deposition method was used to prepare non-toxic zinc oxide films on brass substrates, and piezoelectric devices were fabricated by zinc oxide with the piezoelectric properties to convert mechanical energy into electrical energy. In the results, the zinc oxide films prepared on the brass substrate were produced with the structures of nanorods. With the increases of the deposition voltage and deposition time, the alignment, morphological symmetry, and crystallinity of the zinc oxide nanorods could be effectively improved. By tuning the deposition voltage and electrolyte concentration, the surface morphology and the growth direction of zinc oxide could be well controlled. In addition, the annealing with the temperature of 400°C and 500°C could reduce the crystal defects and improve the crystallinity of zinc oxide. Finall