Light-ion beam for microelectronic applications

In this paper we describe the structure and the composition of (Al,Ga)N/GaN Bragg reflectors obtained from Rutherford backscattering spectroscopy. Bragg reflectors constitute a part of blue (λ=450nm) resonant cavity light emitting diodes. To improve the measurement accuracy, three tilt angles have b...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2005-10, Vol.240 (1-2), p.265-270
Hauptverfasser:	Hirsch, L., Tardy, P., Wantz, G., Huby, N., Moretto, P., Serani, L., Natali, F., Damilano, B., Duboz, J.Y., Reverchon, J.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	ALGaN Bragg reflectors IBIC Instrumentation and Detectors Physics RBs UV detectors
Online-Zugang:	Volltext
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