Use of ion implantation for improving the adhesion of diamond-like carbon films deposited by means of other techniques

Nanoindentation and friction tests have been used to establish the beneficial effect of pre-implantation of low C fluences upon the adhesion of diamond-like coatings synthesized by a laser plasma or by plasma enhanced chemical vapour deposition. The improvement is attributed to an interfacial layer...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1993, Vol.80, p.1499-1501
Hauptverfasser:	Pivin, J.C., Lee, T.J., You, J.H., Park, H., Davanloo, F., Collins, C.B., Catania, P., Sampeur, Y., Bernas, H.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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Zusammenfassung:	Nanoindentation and friction tests have been used to establish the beneficial effect of pre-implantation of low C fluences upon the adhesion of diamond-like coatings synthesized by a laser plasma or by plasma enhanced chemical vapour deposition. The improvement is attributed to an interfacial layer of carbide.
ISSN:	0168-583X 1872-9584 1872-9584 0168-583X
DOI:	10.1016/0168-583X(93)90829-U