Thermal catalytic etching of diamond by double-metal layers

We introduce a novel technique for thermal catalytic etching of single-crystal diamond under hydrogen atmosphere using a double-metal layer consisting of two different metallic thin films. Surface phenomena, catalytic activity, hydrogen pressure dependence and etch rates in several double-metal laye...

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Veröffentlicht in:	Diamond and related materials 2024-05, Vol.145, p.111075, Article 111075
Hauptverfasser:	Tran, D.D., Mannequin, C., Bonvalot, M., Traoré, A., Mariette, H., Sasaki, M., Gheeraert, E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Anisotropic etching Catalytic etching Condensed Matter Diamond Hydrogen Materials Science Physics Solid solution reaction Solubility
Online-Zugang:	Volltext
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