Thermal catalytic etching of diamond by double-metal layers
We introduce a novel technique for thermal catalytic etching of single-crystal diamond under hydrogen atmosphere using a double-metal layer consisting of two different metallic thin films. Surface phenomena, catalytic activity, hydrogen pressure dependence and etch rates in several double-metal laye...
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Veröffentlicht in: | Diamond and related materials 2024-05, Vol.145, p.111075, Article 111075 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We introduce a novel technique for thermal catalytic etching of single-crystal diamond under hydrogen atmosphere using a double-metal layer consisting of two different metallic thin films. Surface phenomena, catalytic activity, hydrogen pressure dependence and etch rates in several double-metal layer configurations were investigated. We observe that etching with an optimized thickness ratio of Ni/Pd films increases the etch rate by a factor up to 11 compared to etching with a single-metal layer Ni film. The proposed double-metal layer technique enhances hydrogen absorption, which contributes to an increased etch rate of the process, as compared to conventional single-metal layer thermal catalytic etching. Moreover, the etched pattern shows smooth (111) plane sidewalls and flat (100) step-terrace bottom features.
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•The Ni/Pd double-metal layer improves the etch rate in thermal catalytic etching of SCD diamond at high temperature and low hydrogen pressure.•Using an optimized Ni/Pd film increases the etch rate by a factor up to 11 compared to etching with a Ni film.•The double-metal layer forms a NiPd solid solution that improves hydrogen absorption to enhance the etch rate. |
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ISSN: | 0925-9635 1879-0062 |
DOI: | 10.1016/j.diamond.2024.111075 |