Gas effect on the emission and detection of the backscattered electrons in a VP-SEM at low energy

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Veröffentlicht in:	Ultramicroscopy 2018-01, Vol.184, p.17-23
Hauptverfasser:	Hafsi, Z., Mansour, O., Kadoun, A., Khouchaf, L., Mathieu, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Physics
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creator	Hafsi, Z. Mansour, O. Kadoun, A. Khouchaf, L. Mathieu, C.
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doi_str_mv	10.1016/j.ultramic.2017.08.002
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source	Elsevier ScienceDirect Journals
subjects	Physics
title	Gas effect on the emission and detection of the backscattered electrons in a VP-SEM at low energy
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