Simulation process flow for the implementation of industry-standard FD-SOI quantum dot devices

•Quantum dot device suitable for quantum computing applications.•Device based on STMicroelectronics' 28 nm UTBB FD-SOI technology.•Development of a dedicated simulation process flow to optimize the design.•Flow involves optical, geometric, electrical, and quantum–mechanical property simulations...

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Veröffentlicht in:Solid-state electronics 2023-11, Vol.209, p.108777, Article 108777
Hauptverfasser: Kriekouki, Ioanna, Philippopoulos, Pericles, Beaudoin, Félix, Mir, Salvador, Barragan, Manuel J., Pioro-Ladrière, Michel, Galy, Philippe
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Sprache:eng
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Zusammenfassung:•Quantum dot device suitable for quantum computing applications.•Device based on STMicroelectronics' 28 nm UTBB FD-SOI technology.•Development of a dedicated simulation process flow to optimize the design.•Flow involves optical, geometric, electrical, and quantum–mechanical property simulations.•Suggestion of wavefunction control via the back-gate bias. The spin of an electron confined to a semiconductor quantum dot is one of the main technology platforms currently evaluated in the pursuit of qubit implementation. In this study, we developed and optimized a full simulation process flow used to model an Ultra-Thin Body and Buried oxide (UTBB) Fully Depleted Silicon-On-Insulator (FD-SOI) quantum dot device fabricated using STMicroelectronics' standard manufacturing process. Here, we report optical, geometrical, electrical, and quantum numerical results that allowed us to assess the device performance before its eventual fabrication.
ISSN:0038-1101
1879-2405
DOI:10.1016/j.sse.2023.108777