Identification of phosphorus sites in amorphous LiPON thin film by observing internuclear proximities

[Display omitted] •Assignment of 31P signals of LiPON thin films prepared by sputtering.•Observation of 31P-14N proximities using TRAPDOR experiments.•Probing 31P-31P proximities using dipolar recoupling techniques.•Quantification of the different P sites in LiPON thin films. Amorphous lithium phosphorus oxynitrides (LiPON), prepared by reactive magnetron sputtering, have become the electrolytes of choice for all-solid-state thin film microbatteries since its discovery in early 1990s. Nevertheless, there is still a lack of understanding of their atomic-level structure and its influence on ionic conductivity. Solid-state NMR spectroscopy represents a promising technique to determine the atomic-level structure of LiPON glasses but is challenging owing to its low sensitivity in the case of thin film materials. Recently, 31P solid-state NMR spectra of LiPON thin films were acquired under magic-angle spinning (MAS) conditions and assigned with the help of density functional theory (DFT) calculations of NMR parameters. However, the identification of the different P local environments in these materials is still a challenge owing to their amorphous structure and the lack of resolution of the 31P MAS NMR spectra. We show herein how the NMR observation of internuclear proximities helps to establish the nature of P sites in LiPON thin films. The 31P-14N proximities are probed by a transfer of population in double resonance (TRAPDOR) experiment, whereas 31P-31P proximities are observed using one-dimensional (1D) 31P double-quantum (DQ)-filtered and two-dimensional (2D) 31P homonuclear correlation spectra as well as dipolar dephasing experiments using DQ-DRENAR (DQ-based dipolar-recoupling effects nuclear alignment reduction) technique. The obtained NMR data further support the recently proposed assignment of 31P NMR signals of LiPON thin films. With the help of this assignment, the simulation of the quantitative 1D 31P NMR spectrum indicates that PO43- orthophosphate anions prevail in LiPON thin films and N atoms are mainly incorporated in [O3PNPO3]5− dimeric anions. PO3N4− isolated tetrahedra and [O3POPO3]4− anions are also present but in smaller amounts.