Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD
The electro-optical properties of films (HMDSO/ O 2 ) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index n , dielectric permittivity ε , extinction and absorption coefficients using of numeri...
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| Veröffentlicht in: | Journal of materials science. Materials in electronics 2023-06, Vol.34 (18), p.1413, Article 1413 |
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| container_issue | 18 |
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| container_title | Journal of materials science. Materials in electronics |
| container_volume | 34 |
| creator | Amri, R. Hamed, Z. Ben Gamra, D. Lejeune, M. Bouchriha, H. |
| description | The electro-optical properties of films (HMDSO/ O
2
) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index
n
, dielectric permittivity
ε
, extinction and absorption coefficients using of numerical commercial software “CODE”. The analysis of the latter made using classic models such as Cauchy, Drude-Lorentz and Tauc. These allow the determination of optical constants such as the plasma frequency, the ratio of carrier density/effective mass the optical conductivity. Finally, the infrared analysis by Fourier transfer allowed understanding the structural changes that help to understand the optical behavior. |
| doi_str_mv | 10.1007/s10854-023-10749-4 |
| format | Article |
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2
) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index
n
, dielectric permittivity
ε
, extinction and absorption coefficients using of numerical commercial software “CODE”. The analysis of the latter made using classic models such as Cauchy, Drude-Lorentz and Tauc. These allow the determination of optical constants such as the plasma frequency, the ratio of carrier density/effective mass the optical conductivity. Finally, the infrared analysis by Fourier transfer allowed understanding the structural changes that help to understand the optical behavior.</description><identifier>ISSN: 0957-4522</identifier><identifier>EISSN: 1573-482X</identifier><identifier>DOI: 10.1007/s10854-023-10749-4</identifier><language>eng</language><publisher>New York: Springer US</publisher><subject>Absorptivity ; Carrier density ; Characterization and Evaluation of Materials ; Chemical vapor deposition ; Chemistry and Materials Science ; Condensed Matter ; Extinction ; Glass substrates ; Infrared analysis ; Materials Science ; Optical and Electronic Materials ; Optical properties ; Oxygen ; Photovoltaic cells ; Physics ; Plasma ; Plasma frequencies ; Polymerization ; Refractivity ; Software ; Spectrum analysis ; Temperature ; Thin films ; Transistors</subject><ispartof>Journal of materials science. Materials in electronics, 2023-06, Vol.34 (18), p.1413, Article 1413</ispartof><rights>The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c304t-77ad0d282f555e7ef8fcec5e70f4a79c1a71f256e06028c2c98f8aba034b181c3</cites><orcidid>0000-0002-9137-9073 ; 0000-0002-2846-5227</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s10854-023-10749-4$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s10854-023-10749-4$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>230,314,776,780,881,27901,27902,41464,42533,51294</link.rule.ids><backlink>$$Uhttps://u-picardie.hal.science/hal-04179920$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Amri, R.</creatorcontrib><creatorcontrib>Hamed, Z. Ben</creatorcontrib><creatorcontrib>Gamra, D.</creatorcontrib><creatorcontrib>Lejeune, M.</creatorcontrib><creatorcontrib>Bouchriha, H.</creatorcontrib><title>Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD</title><title>Journal of materials science. Materials in electronics</title><addtitle>J Mater Sci: Mater Electron</addtitle><description>The electro-optical properties of films (HMDSO/ O
2
) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index
n
, dielectric permittivity
ε
, extinction and absorption coefficients using of numerical commercial software “CODE”. The analysis of the latter made using classic models such as Cauchy, Drude-Lorentz and Tauc. These allow the determination of optical constants such as the plasma frequency, the ratio of carrier density/effective mass the optical conductivity. Finally, the infrared analysis by Fourier transfer allowed understanding the structural changes that help to understand the optical behavior.</description><subject>Absorptivity</subject><subject>Carrier density</subject><subject>Characterization and Evaluation of Materials</subject><subject>Chemical vapor deposition</subject><subject>Chemistry and Materials Science</subject><subject>Condensed Matter</subject><subject>Extinction</subject><subject>Glass substrates</subject><subject>Infrared analysis</subject><subject>Materials Science</subject><subject>Optical and Electronic Materials</subject><subject>Optical properties</subject><subject>Oxygen</subject><subject>Photovoltaic cells</subject><subject>Physics</subject><subject>Plasma</subject><subject>Plasma frequencies</subject><subject>Polymerization</subject><subject>Refractivity</subject><subject>Software</subject><subject>Spectrum analysis</subject><subject>Temperature</subject><subject>Thin films</subject><subject>Transistors</subject><issn>0957-4522</issn><issn>1573-482X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNp9kU9PGzEQxa2qSE2hX6AnSz31YBh7vbH3iMKfIAUFCVr1ZjleO3G0u97aGyB8ehy2ojdOM3r6vafRPIS-UzilAOIsUZAlJ8AKQkHwivBPaEJLURAu2Z_PaAJVKQgvGfuCvqa0BYApL-QEPS37wRvd4DbUtvHdGuuuxr57tGnwaz340OHg8LDxHXa-aRNe6WRrnOW-0anVpA_NvrXRv2R1fntxv8S7rrYRh-f92mZTE55wbfuQ_JCJ1R7fXc5-X5ygI6ebZL_9m8fo19Xlw2xOFsvrm9n5gpgC-ECE0DXUTDJXlqUV1klnrMkbOK5FZagW1LFyamEKTBpmKumkXmko-IpKaopj9HPM3ehG9dG3Ou5V0F7NzxfqoAGnoqoYPNLM_hjZPoa_u_wAtQ272OXzVL6gojR_7ECxkTIxpBSte4-loA5lqLEMlctQb2Uonk3FaEoZ7tY2_o_-wPUKFAaM6w</recordid><startdate>20230601</startdate><enddate>20230601</enddate><creator>Amri, R.</creator><creator>Hamed, Z. 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Materials in electronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Amri, R.</au><au>Hamed, Z. Ben</au><au>Gamra, D.</au><au>Lejeune, M.</au><au>Bouchriha, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD</atitle><jtitle>Journal of materials science. Materials in electronics</jtitle><stitle>J Mater Sci: Mater Electron</stitle><date>2023-06-01</date><risdate>2023</risdate><volume>34</volume><issue>18</issue><spage>1413</spage><pages>1413-</pages><artnum>1413</artnum><issn>0957-4522</issn><eissn>1573-482X</eissn><abstract>The electro-optical properties of films (HMDSO/ O
2
) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index
n
, dielectric permittivity
ε
, extinction and absorption coefficients using of numerical commercial software “CODE”. The analysis of the latter made using classic models such as Cauchy, Drude-Lorentz and Tauc. These allow the determination of optical constants such as the plasma frequency, the ratio of carrier density/effective mass the optical conductivity. Finally, the infrared analysis by Fourier transfer allowed understanding the structural changes that help to understand the optical behavior.</abstract><cop>New York</cop><pub>Springer US</pub><doi>10.1007/s10854-023-10749-4</doi><orcidid>https://orcid.org/0000-0002-9137-9073</orcidid><orcidid>https://orcid.org/0000-0002-2846-5227</orcidid></addata></record> |
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| subjects | Absorptivity Carrier density Characterization and Evaluation of Materials Chemical vapor deposition Chemistry and Materials Science Condensed Matter Extinction Glass substrates Infrared analysis Materials Science Optical and Electronic Materials Optical properties Oxygen Photovoltaic cells Physics Plasma Plasma frequencies Polymerization Refractivity Software Spectrum analysis Temperature Thin films Transistors |
| title | Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD |
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