Optical modeling and investigation of thin films based on plasma-polymerized HMDSO under oxygen flow deposited by PECVD

The electro-optical properties of films (HMDSO/ O 2 ) deposited by the chemical pathway at different oxygen streams are studied through visible transmission and reflection spectra. Modeling of the refractive index n , dielectric permittivity ε , extinction and absorption coefficients using of numerical commercial software “CODE”. The analysis of the latter made using classic models such as Cauchy, Drude-Lorentz and Tauc. These allow the determination of optical constants such as the plasma frequency, the ratio of carrier density/effective mass the optical conductivity. Finally, the infrared analysis by Fourier transfer allowed understanding the structural changes that help to understand the optical behavior.