Fabrication of large all-PDMS micropatterned waveguides for lab on chip integration using a rapid prototyping technique
A simple method for manufacturing centimeter-long all-PDMS embedded and rib microwaveguides is presented. It allows for the fabrication of centimeter-long micromolds by direct laser ablation of a desired waveguide pattern inside an acrylic sheet to create a pattern which is then transferred to a pol...
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Veröffentlicht in: | Optical materials express 2017-04, Vol.7 (4), p.1343-1350 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A simple method for manufacturing centimeter-long all-PDMS embedded and rib microwaveguides is presented. It allows for the fabrication of centimeter-long micromolds by direct laser ablation of a desired waveguide pattern inside an acrylic sheet to create a pattern which is then transferred to a poly-dimethylsiloxane (PDMS) layer using soft-lithography. A refractive index difference between the core and cladding of 1.3x10 super(-3) was achieved by controlling the PDMS curing and linear attenuation of 1.27 dB/cm for embedded and 2.36 dB/cm for a rib waveguide, similar to other techniques. Finally, a beamsplitter was fabricated to demonstrate that our low-cost process is suitable to integrate waveguide devices on lab on chip platforms. |
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ISSN: | 2159-3930 2159-3930 |
DOI: | 10.1364/OME.7.001343 |