Effect of electric field polarization and temperature on the effective permittivity and conductivity of porous anodic aluminium oxide membranes

Porous insulators offer new opportunities for the controlled guest–host synthesis of nanowires for future integrated circuits characterized by low propagation delay, crosstalk and power consumption. We propose a method to estimate the effect of the electric field polarization and temperature on the...

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Veröffentlicht in:Microelectronic engineering 2011-11, Vol.88 (11), p.3338-3346
Hauptverfasser: Tamburrano, Alessio, De Vivo, Biagio, Höijer, Magnus, Arurault, Laurent, Tucci, Vincenzo, Fontorbes, Sandra, Lamberti, Patrizia, Vilar, Virginie, Daffos, Barbara, Sarto, Maria Sabrina
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Sprache:eng
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Zusammenfassung:Porous insulators offer new opportunities for the controlled guest–host synthesis of nanowires for future integrated circuits characterized by low propagation delay, crosstalk and power consumption. We propose a method to estimate the effect of the electric field polarization and temperature on the electrical properties of different types of synthesized porous anodic aluminium oxide membranes. It results that the effective permittivity along the pore axis is generally 20% higher than the one in the orthogonal direction. The type of solution and the voltage level applied during anodization are the main parameters affecting the AAO templates characteristics, i.e. their porosity and chemical content. The values of permittivity of the final material, are typically in the range 2.6–3.2 for large pore diameter membranes including phosphorus element and having a low water content, and in the range 3.5–4 for the ones with smaller pores, and showing sulphur element incorporation. Moreover, the dc conductivity of the different membranes appears to be correlated to the pore density.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2011.08.007