Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers

Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers

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Veröffentlicht in:ACS applied materials & interfaces 2021-03, Vol.13 (9), p.11224-11236
Hauptverfasser: Chevalier, Xavier, Gomes Correia, Cindy, Pound-Lana, Gwenaelle, Bézard, Philippe, Sérégé, Matthieu, Petit-Etienne, Camille, Gay, Guillaume, Cunge, Gilles, Cabannes-Boué, Benjamin, Nicolet, Célia, Navarro, Christophe, Cayrefourcq, Ian, Müller, Marcus, Hadziioannou, Georges, Iliopoulos, Ilias, Fleury, Guillaume, Zelsmann, Marc
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Engineering Sciences
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container_end_page 11236
container_issue 9
container_start_page 11224
container_title ACS applied materials & interfaces
container_volume 13
creator Chevalier, Xavier
Gomes Correia, Cindy
Pound-Lana, Gwenaelle
Bézard, Philippe
Sérégé, Matthieu
Petit-Etienne, Camille
Gay, Guillaume
Cunge, Gilles
Cabannes-Boué, Benjamin
Nicolet, Célia
Navarro, Christophe
Cayrefourcq, Ian
Müller, Marcus
Hadziioannou, Georges
Iliopoulos, Ilias
Fleury, Guillaume
Zelsmann, Marc
description
doi_str_mv 10.1021/acsami.1c00694
format Article
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subjects Engineering Sciences
title Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers
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