Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method

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Veröffentlicht in:	Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 1998-08, Vol.55 (1-2), p.123-129
Hauptverfasser:	DEFAY, E, LEBERRE, M, SEMMACHE, B, TROCCAZ, M, BARBIER, D
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Engineering Sciences Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Niobates, titanates, tantalates, pzt ceramics, etc Physics
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