Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr, Ti)O3 thin films

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Bibliographische Detailangaben
Veröffentlicht in:	Sensors and actuators. A, Physical Physical, 1999-04, Vol.74 (1-3), p.77-80
Hauptverfasser:	DEFAY, E, SEMMACHE, B, DUBOIS, C, LEBERRE, M, BARBIER, D
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemistry Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Engineering Sciences Exact sciences and technology Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry) Materials science Methods of deposition of films and coatings film growth and epitaxy Niobates, titanates, tantalates, pzt ceramics, etc Physics Spectrometric and optical methods
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