DNA Origami for Silicon Patterning

Desoxyribonucleic acid (DNA) origami architectures are a promising tool for ultimate lithography because of their ability to generate nanostructures with a minimum feature size down to 2 nm. In this paper, we developed a method for silicon (Si) nanopatterning to face up current limitations for high-...

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Veröffentlicht in:	ACS applied materials & interfaces 2020-08, Vol.12 (32), p.36799-36809
Hauptverfasser:	Thomas, Guillaume, Diagne, Cheikh Tidiane, Baillin, Xavier, Chevolleau, Thierry, Charvolin, Thomas, Tiron, Raluca
Format:	Artikel
Sprache:	eng
Schlagworte:	Adsorption DNA - chemistry Hydrobromic Acid - chemistry Hydrofluoric Acid - chemistry Nanostructures - chemistry Nanotechnology Oxygen - chemistry Physics Plasma Gases Printing Silicon - chemistry Silicon Dioxide - chemistry Surface Properties Surfaces, Interfaces, and Applications
Online-Zugang:	Volltext
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