Photo-Robotic Extrinsic Parameters Calibration of 6-DOF Robot for High Positioning Accuracy

Hybrid integration of individual photonic elements appears particularly promising. It indeed provides high performances, proposes new optical functionalities and products, and exploits new propagation modes of light beams. This approach requires an accurate multi-degrees-of-freedom (DOF) positioning of the individual photonic elements. Hence, the inaccurate multi-DOF measurements and robots control are the main locks to overcome, notably at the microscale. For this sake, in this article, an original photo-robotic approach has been proposed. It relies on multi-DOF robot's motion associated with the use of 1-D Fabry-Perot interferometry measurement to achieve multi-DOF pose measurement. This original photo-robotic approach notably integrates the issue of extrinsic parameters calibration through a proposed photo-robotic calibration model. Experimental investigations demonstrate that a translational positioning accuracy of 390 nm was obtained. This photo-robotic approach has especially been applied to achieve the 6-DOF positioning of an optical lamella relative to an optical fiber with high accuracy that also conducts to maximum optical reflectivity.