On the Modeling of Electrical Response of SAW Resonator-based Sensors Versus Temperature

Surface acoustic wave (SAW) resonators built on Langasite (LGS) are capable to withstand temperature in excess of 900∘ C and demonstration of wireless interrogation of packaged sensors up to 700∘ C has been achieved for several tens of hours. These promising results emphasize the need for an accurate characterization of the raw material in order to design SAW resonators with a high level of confidence in the prediction, particularly concerning the temperature coefficient of frequency (TCF). Several data set have been published for LGS, offering prediction capabilities but also a significant level of data dispersion. Therefore, the evaluation of the effective thermal properties of SAW under periodic gratings turns out less robust than expected. Based also on published data and on measurements achieved within the SAWHOT project, harmonic admittance calculations have been achieved for deriving the evolution of mixed matrix parameters allowing for accurate SAW device simulation at any temperature. Adjusting the temperature coefficients then yield improved sets of material coefficients for design purpose. Using these data, we have demonstrated the possibility to develop a differential temperature sensor operating at temperature up to 600°C.