Highly Textured Mn15Si26 Film Obtained by High-Temperature Treatment
The growth of higher manganese silicide (HMS) films on monocrystalline silicon (100) has been investigated. This growth was performed by solid-state reaction. Using electron beam evaporation a single layer of manganese was deposited on a silicon substrate. The samples so prepared were heat treated i...
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Veröffentlicht in: | Journal of electronic materials 2012-12, Vol.41 (12), p.3423-3426 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The growth of higher manganese silicide (HMS) films on monocrystalline silicon (100) has been investigated. This growth was performed by solid-state reaction. Using electron beam evaporation a single layer of manganese was deposited on a silicon substrate. The samples so prepared were heat treated in a classical furnace under vacuum. A highly textured film was obtained after treatment at 890°C for 18 h. The obtained HMS was identified as Mn
15
Si
26
. The texture relationship is (105) [100] Mn
15
Si
26
∥ (100) [100] Si. Mn
15
Si
26
has a tetragonal cell; hence, the angle between the
c
-axis and the normal of the sample surface is 60°. Since this value is far from 0° and 90°, a large transverse thermoelectric effect is expected in these samples. As a consequence the HMS films could be used in anisotropic electromotive force-thermogenerators. |
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ISSN: | 0361-5235 1543-186X |
DOI: | 10.1007/s11664-012-2257-5 |