TEM analysis of photocatalytic TiO2 thin films deposited on polymer substrates by low-temperature ICP-PECVD

TEM analysis of photocatalytic TiO2 thin films deposited on polymer substrates by low-temperature ICP-PECVD

TiO2 thin films were deposited on polymer substrates (polyethylene terephthalate and polystyrene) at low substrate temperature (

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Bibliographische Detailangaben
Veröffentlicht in:Applied surface science 2019-10, Vol.491, p.116-122
Hauptverfasser: Li, D., Gautier, N., Dey, B., Bulou, S., Richard-Plouet, M., Ravisy, W., Goullet, A., Choquet, P., Granier, A.
Format: Artikel
Sprache:eng
Schlagworte:
Anatase
Condensed Matter
Materials Science
PECVD
Photocatalytic properties
Physics
Polymer substrates
TEM
TiO2
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Beschreibung
Zusammenfassung:TiO2 thin films were deposited on polymer substrates (polyethylene terephthalate and polystyrene) at low substrate temperature (
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2019.06.045