Single-pulse femtosecond laser fabrication of concave microlens- and micromirror arrays in chalcohalide glass

•First fabrication of microlenses in chalcohalide glass with single laser pulses.•The process is based on fs laser ablation.•The lenses demonstrate diffraction-limited specifications.•Microlens array has been produced by scanning the sample with repetitive pulses.•Metal coating converts concave microlenses into concave micromirrors. The diffraction-limited plano-concave microlens- and micromirror arrays were produced in chalcohalide glass of 65GeS2-25Ga2S3-10CsCl composition transparent from ∼0.5 to 11µm. Only a single 200fs laser pulse with 800nm central wavelength is required to form microlens, which after metal coating becomes a concave micromirror. This process can serve as a basis for flexible technology to fabricate regular microlens and micromirror arrays for optotelecom applications, its performance being limited only by repetition rate of the laser pulses (typically 1000 microlenses per second).