Performance analysis and characterisation of micro-nanopositioning systems

Separation and quantification of error components in micro-nanopositioning systems are presented with theoretical analysis and experimental characterisation, which are illustrated with a single-axis nanopositioning stage. The concepts of intrinsic and extrinsic repeatabilities are proposed.

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Veröffentlicht in:	Electronics letters 2014-11, Vol.50 (24), p.1853-1855
Hauptverfasser:	Tan, Ning, Clévy, Cédric, Chaillet, Nicolas
Format:	Artikel
Sprache:	eng
Schlagworte:	Automatic Engineering Sciences Error analysis error components quantification error components separation extrinsic repeatabilities intrinsic repeatabilities micronanopositioning systems nanopositioning Nanostructure Nanotechnology performance analysis Repeatability Reproducibility robots Separation single‐axis nanopositioning stage
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Beschreibung
Zusammenfassung:	Separation and quantification of error components in micro-nanopositioning systems are presented with theoretical analysis and experimental characterisation, which are illustrated with a single-axis nanopositioning stage. The concepts of intrinsic and extrinsic repeatabilities are proposed.
ISSN:	0013-5194 1350-911X 1350-911X
DOI:	10.1049/el.2014.0926