Laser ablation using high repetition rate Cu/HBr laser
The application of a home made Cu/HBr laser for pulsed laser deposition is investigated. This laser operates at 15 KHz repetition rate with 50 ns pulses of two wavelengths (578 and 510 nm) and with a maximum total power of 100 W. The parameters which define the ablation condition and the specific pl...
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Veröffentlicht in: | Thin solid films 2004-04, Vol.453-454 (Complete), p.345-349 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The application of a home made Cu/HBr laser for pulsed laser deposition is investigated. This laser operates at 15 KHz repetition rate with 50 ns pulses of two wavelengths (578 and 510 nm) and with a maximum total power of 100 W. The parameters which define the ablation condition and the specific plasma features are determined and compared to those obtained using a Nd:YAG laser. The effects of including a magnetic field oriented perpendicularly to the target plane in the plasma expansion region are examined. With the Cu/HBr laser the frontal deposition rate is 4 times higher than that obtained with the Nd:YAG laser, increasing up to 40 times when the magnetic field is included in the set-up. However, the ablation process has a duration of 30–40 s and decreases drastically at longer times. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2003.11.100 |