Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors

The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of th...

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Veröffentlicht in:Applied physics letters 2014-02, Vol.104 (7)
Hauptverfasser: Kiser, Jillian, Lacomb, Ron, Bussmann, Konrad, Hawley, Christopher J., Spanier, Jonathan E., Zhuang, Xin, Dolabdjian, Christophe, Lofland, Sam, Finkel, Peter
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Sprache:eng
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Zusammenfassung:The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of the fundamental resonance frequency is a function of magnetic field orientation due to stress-induced anisotropy. These devices may offer a new approach for developing fully integrated resonant magnetic field sensing technology.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4866044