Ultra light tunable capacitor based on PZT thin film deposited onto aluminium foil

Lead zirconate titanate (PZT) thin films with a Zr/Ti ratio of 57/43, elaborated by a derived sol–gel process, have been deposited onto bare and RuO 2 coated aluminium substrate 16 μm thick. Commercial aluminium foil presents many advantages as ultra light weight (43 g m −2 ), conformability, conduc...

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Veröffentlicht in:Journal of sol-gel science and technology 2013-11, Vol.68 (2), p.175-179
Hauptverfasser: Seveno, R., Averty, D.
Format: Artikel
Sprache:eng
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Zusammenfassung:Lead zirconate titanate (PZT) thin films with a Zr/Ti ratio of 57/43, elaborated by a derived sol–gel process, have been deposited onto bare and RuO 2 coated aluminium substrate 16 μm thick. Commercial aluminium foil presents many advantages as ultra light weight (43 g m −2 ), conformability, conduction, can be easily cut, and is one of the cheapest substrates used for PZT thin films deposition (
ISSN:0928-0707
1573-4846
DOI:10.1007/s10971-013-3149-8