Ultra light tunable capacitor based on PZT thin film deposited onto aluminium foil
Lead zirconate titanate (PZT) thin films with a Zr/Ti ratio of 57/43, elaborated by a derived sol–gel process, have been deposited onto bare and RuO 2 coated aluminium substrate 16 μm thick. Commercial aluminium foil presents many advantages as ultra light weight (43 g m −2 ), conformability, conduc...
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Veröffentlicht in: | Journal of sol-gel science and technology 2013-11, Vol.68 (2), p.175-179 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Lead zirconate titanate (PZT) thin films with a Zr/Ti ratio of 57/43, elaborated by a derived sol–gel process, have been deposited onto bare and RuO
2
coated aluminium substrate 16 μm thick. Commercial aluminium foil presents many advantages as ultra light weight (43 g m
−2
), conformability, conduction, can be easily cut, and is one of the cheapest substrates used for PZT thin films deposition ( |
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ISSN: | 0928-0707 1573-4846 |
DOI: | 10.1007/s10971-013-3149-8 |