Electrical Characterization of Advanced MIM Capacitors With ZrO2 Insulator for High-Density Packaging and RF Applications

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Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on components, packaging, and manufacturing technology (2011) packaging, and manufacturing technology (2011), 2012-03, Vol.2 (3-4), p.502-509
Hauptverfasser:	BERTAUD, Thomas, BERMOND, Cedric, BLONKOWSKI, Serge, VALLEE, Christophe, LACREVAZ, Thierry, FARCY, Alexis, GROS-JEAN, Mickael, FLECHET, Bernard
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Design. Technologies. Operation analysis. Testing Dielectric, amorphous and glass solid devices Electronics Exact sciences and technology Integrated circuits Materials Measurements common to several branches of physics and astronomy Metrology, measurements and laboratory procedures Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Time and frequency
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