SIMS quantification of thick Si1-xGex films (0 ≤ x ≤ 1) using the isotopic comparative method under Ar+ beam
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| Veröffentlicht in: | Surface and interface analysis 2013, Vol.45 |
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| container_title | Surface and interface analysis |
| container_volume | 45 |
| creator | Prudon, G. Dubois, C. Gautier, B. Dupuy, J.C. Graf, J.P. Le Gall, Y. Muller, D. |
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| format | Article |
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| identifier | ISSN: 0142-2421 |
| ispartof | Surface and interface analysis, 2013, Vol.45 |
| issn | 0142-2421 1096-9918 |
| language | eng |
| recordid | cdi_hal_primary_oai_HAL_hal_00769807v1 |
| source | Wiley Online Library (Online service) |
| title | SIMS quantification of thick Si1-xGex films (0 ≤ x ≤ 1) using the isotopic comparative method under Ar+ beam |
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