High quality factor photonic resonators for nitride quantum dots

We report the realization and the optical study of nitride photonic resonators dedicated to the blue and UV spectral range. Microdisks and photonic crystal (PC) cavities are investigated containing GaN/AlN quantum dots (QDs) embedded in an AlN waveguide. The PC cavities are fabricated through the conformal growth of nitrides on a patterned Si substrate, and present delocalized and confined cavity modes in their microphotoluminescence spectra, that are compared to simulations. A large quality factor of 1800 is reached for a modified L3 cavity. In the case of microdisks, which are fabricated through a classical top‐down approach, the series of whispering gallery modes (WGMs) with large quality factors (up to 7300) are observed and analysed. Scanning electron micrograph and microphotoluminescence spectrum of a 2 µm AlN microdisk embedding GaN QDs; the WGMs appear as sharp peaks, with quality factors up to 5000.