On the heating of nano- and microparticles in process plasmas
Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has b...
Gespeichert in:
Veröffentlicht in: | Journal of physics. D, Applied physics Applied physics, 2011-05, Vol.44 (17), p.174029 |
---|---|
Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | |
---|---|
container_issue | 17 |
container_start_page | 174029 |
container_title | Journal of physics. D, Applied physics |
container_volume | 44 |
creator | Maurer, H R Kersten, H |
description | Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance. |
doi_str_mv | 10.1088/0022-3727/44/17/174029 |
format | Article |
fullrecord | <record><control><sourceid>hal_cross</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_00613284v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>oai_HAL_hal_00613284v1</sourcerecordid><originalsourceid>FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</originalsourceid><addsrcrecordid>eNqFkE9LxDAQxYMouK5-BcnFg4e6M0matAcPy-I_WNiLnsM0Td1Ity1NEfz2dqn0oiAMDMz83uPxGLtGuEPIshWAEIk0wqyUWqEZR4HIT9gCpcZEKy1P2WKGztlFjB8AkOoMF-x-1_Bh7_ne0xCad95WvKGmTTg1JT8E17cd9UNwtY88NLzrW-dj5F1N8UDxkp1VVEd_9bOX7O3x4XXznGx3Ty-b9TZxKcohcSgRyrQQFaaVEs6BSo1InSlUQXmZK0NeaJNphwVUThvwjlBkqXQCM1RyyW4n3z3VtuvDgfov21Kwz-utPd4ANEqRqU8cWT2xY_YYe1_NAgR7LMweu7DHLqxSFo2dChuFN5Owo-iornpqXIizWihUIgc5csnEhbabv3972q6sRh5_8_9k-QY86oTO</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>On the heating of nano- and microparticles in process plasmas</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Maurer, H R ; Kersten, H</creator><creatorcontrib>Maurer, H R ; Kersten, H</creatorcontrib><description>Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.</description><identifier>ISSN: 0022-3727</identifier><identifier>EISSN: 1361-6463</identifier><identifier>DOI: 10.1088/0022-3727/44/17/174029</identifier><identifier>CODEN: JPAPBE</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Materials science ; Nanocrystalline materials ; Nanopowders ; Nanoscale materials and structures: fabrication and characterization ; Physics ; Physics of gases, plasmas and electric discharges ; Physics of plasmas and electric discharges ; Plasma applications ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thin film structure and morphology</subject><ispartof>Journal of physics. D, Applied physics, 2011-05, Vol.44 (17), p.174029</ispartof><rights>2015 INIST-CNRS</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</citedby><cites>FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0022-3727/44/17/174029/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>230,314,780,784,885,27924,27925,53830,53910</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=24142903$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-00613284$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Maurer, H R</creatorcontrib><creatorcontrib>Kersten, H</creatorcontrib><title>On the heating of nano- and microparticles in process plasmas</title><title>Journal of physics. D, Applied physics</title><description>Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Materials science</subject><subject>Nanocrystalline materials</subject><subject>Nanopowders</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Physics</subject><subject>Physics of gases, plasmas and electric discharges</subject><subject>Physics of plasmas and electric discharges</subject><subject>Plasma applications</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thin film structure and morphology</subject><issn>0022-3727</issn><issn>1361-6463</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNqFkE9LxDAQxYMouK5-BcnFg4e6M0matAcPy-I_WNiLnsM0Td1Ity1NEfz2dqn0oiAMDMz83uPxGLtGuEPIshWAEIk0wqyUWqEZR4HIT9gCpcZEKy1P2WKGztlFjB8AkOoMF-x-1_Bh7_ne0xCad95WvKGmTTg1JT8E17cd9UNwtY88NLzrW-dj5F1N8UDxkp1VVEd_9bOX7O3x4XXznGx3Ty-b9TZxKcohcSgRyrQQFaaVEs6BSo1InSlUQXmZK0NeaJNphwVUThvwjlBkqXQCM1RyyW4n3z3VtuvDgfov21Kwz-utPd4ANEqRqU8cWT2xY_YYe1_NAgR7LMweu7DHLqxSFo2dChuFN5Owo-iornpqXIizWihUIgc5csnEhbabv3972q6sRh5_8_9k-QY86oTO</recordid><startdate>20110504</startdate><enddate>20110504</enddate><creator>Maurer, H R</creator><creator>Kersten, H</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><scope>VOOES</scope></search><sort><creationdate>20110504</creationdate><title>On the heating of nano- and microparticles in process plasmas</title><author>Maurer, H R ; Kersten, H</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Materials science</topic><topic>Nanocrystalline materials</topic><topic>Nanopowders</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Physics</topic><topic>Physics of gases, plasmas and electric discharges</topic><topic>Physics of plasmas and electric discharges</topic><topic>Plasma applications</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thin film structure and morphology</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Maurer, H R</creatorcontrib><creatorcontrib>Kersten, H</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Journal of physics. D, Applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Maurer, H R</au><au>Kersten, H</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On the heating of nano- and microparticles in process plasmas</atitle><jtitle>Journal of physics. D, Applied physics</jtitle><date>2011-05-04</date><risdate>2011</risdate><volume>44</volume><issue>17</issue><spage>174029</spage><pages>174029-</pages><issn>0022-3727</issn><eissn>1361-6463</eissn><coden>JPAPBE</coden><abstract>Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/0022-3727/44/17/174029</doi><oa>free_for_read</oa></addata></record> |
fulltext | fulltext |
identifier | ISSN: 0022-3727 |
ispartof | Journal of physics. D, Applied physics, 2011-05, Vol.44 (17), p.174029 |
issn | 0022-3727 1361-6463 |
language | eng |
recordid | cdi_hal_primary_oai_HAL_hal_00613284v1 |
source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
subjects | Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Nanocrystalline materials Nanopowders Nanoscale materials and structures: fabrication and characterization Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
title | On the heating of nano- and microparticles in process plasmas |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T01%3A18%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-hal_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=On%20the%20heating%20of%20nano-%20and%20microparticles%20in%20process%20plasmas&rft.jtitle=Journal%20of%20physics.%20D,%20Applied%20physics&rft.au=Maurer,%20H%20R&rft.date=2011-05-04&rft.volume=44&rft.issue=17&rft.spage=174029&rft.pages=174029-&rft.issn=0022-3727&rft.eissn=1361-6463&rft.coden=JPAPBE&rft_id=info:doi/10.1088/0022-3727/44/17/174029&rft_dat=%3Chal_cross%3Eoai_HAL_hal_00613284v1%3C/hal_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |