On the heating of nano- and microparticles in process plasmas

Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has b...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2011-05, Vol.44 (17), p.174029
Hauptverfasser: Maurer, H R, Kersten, H
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue 17
container_start_page 174029
container_title Journal of physics. D, Applied physics
container_volume 44
creator Maurer, H R
Kersten, H
description Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.
doi_str_mv 10.1088/0022-3727/44/17/174029
format Article
fullrecord <record><control><sourceid>hal_cross</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_00613284v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>oai_HAL_hal_00613284v1</sourcerecordid><originalsourceid>FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</originalsourceid><addsrcrecordid>eNqFkE9LxDAQxYMouK5-BcnFg4e6M0matAcPy-I_WNiLnsM0Td1Ity1NEfz2dqn0oiAMDMz83uPxGLtGuEPIshWAEIk0wqyUWqEZR4HIT9gCpcZEKy1P2WKGztlFjB8AkOoMF-x-1_Bh7_ne0xCad95WvKGmTTg1JT8E17cd9UNwtY88NLzrW-dj5F1N8UDxkp1VVEd_9bOX7O3x4XXznGx3Ty-b9TZxKcohcSgRyrQQFaaVEs6BSo1InSlUQXmZK0NeaJNphwVUThvwjlBkqXQCM1RyyW4n3z3VtuvDgfov21Kwz-utPd4ANEqRqU8cWT2xY_YYe1_NAgR7LMweu7DHLqxSFo2dChuFN5Owo-iornpqXIizWihUIgc5csnEhbabv3972q6sRh5_8_9k-QY86oTO</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>On the heating of nano- and microparticles in process plasmas</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Maurer, H R ; Kersten, H</creator><creatorcontrib>Maurer, H R ; Kersten, H</creatorcontrib><description>Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.</description><identifier>ISSN: 0022-3727</identifier><identifier>EISSN: 1361-6463</identifier><identifier>DOI: 10.1088/0022-3727/44/17/174029</identifier><identifier>CODEN: JPAPBE</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Materials science ; Nanocrystalline materials ; Nanopowders ; Nanoscale materials and structures: fabrication and characterization ; Physics ; Physics of gases, plasmas and electric discharges ; Physics of plasmas and electric discharges ; Plasma applications ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thin film structure and morphology</subject><ispartof>Journal of physics. D, Applied physics, 2011-05, Vol.44 (17), p.174029</ispartof><rights>2015 INIST-CNRS</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</citedby><cites>FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0022-3727/44/17/174029/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>230,314,780,784,885,27924,27925,53830,53910</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=24142903$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-00613284$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Maurer, H R</creatorcontrib><creatorcontrib>Kersten, H</creatorcontrib><title>On the heating of nano- and microparticles in process plasmas</title><title>Journal of physics. D, Applied physics</title><description>Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Materials science</subject><subject>Nanocrystalline materials</subject><subject>Nanopowders</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Physics</subject><subject>Physics of gases, plasmas and electric discharges</subject><subject>Physics of plasmas and electric discharges</subject><subject>Plasma applications</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thin film structure and morphology</subject><issn>0022-3727</issn><issn>1361-6463</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNqFkE9LxDAQxYMouK5-BcnFg4e6M0matAcPy-I_WNiLnsM0Td1Ity1NEfz2dqn0oiAMDMz83uPxGLtGuEPIshWAEIk0wqyUWqEZR4HIT9gCpcZEKy1P2WKGztlFjB8AkOoMF-x-1_Bh7_ne0xCad95WvKGmTTg1JT8E17cd9UNwtY88NLzrW-dj5F1N8UDxkp1VVEd_9bOX7O3x4XXznGx3Ty-b9TZxKcohcSgRyrQQFaaVEs6BSo1InSlUQXmZK0NeaJNphwVUThvwjlBkqXQCM1RyyW4n3z3VtuvDgfov21Kwz-utPd4ANEqRqU8cWT2xY_YYe1_NAgR7LMweu7DHLqxSFo2dChuFN5Owo-iornpqXIizWihUIgc5csnEhbabv3972q6sRh5_8_9k-QY86oTO</recordid><startdate>20110504</startdate><enddate>20110504</enddate><creator>Maurer, H R</creator><creator>Kersten, H</creator><general>IOP Publishing</general><general>Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><scope>VOOES</scope></search><sort><creationdate>20110504</creationdate><title>On the heating of nano- and microparticles in process plasmas</title><author>Maurer, H R ; Kersten, H</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c513t-c1310d5b2f15f42cc045725c7b4ba9d947ae26786c1b0fc670eca12853c218143</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Materials science</topic><topic>Nanocrystalline materials</topic><topic>Nanopowders</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Physics</topic><topic>Physics of gases, plasmas and electric discharges</topic><topic>Physics of plasmas and electric discharges</topic><topic>Plasma applications</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thin film structure and morphology</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Maurer, H R</creatorcontrib><creatorcontrib>Kersten, H</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Journal of physics. D, Applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Maurer, H R</au><au>Kersten, H</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On the heating of nano- and microparticles in process plasmas</atitle><jtitle>Journal of physics. D, Applied physics</jtitle><date>2011-05-04</date><risdate>2011</risdate><volume>44</volume><issue>17</issue><spage>174029</spage><pages>174029-</pages><issn>0022-3727</issn><eissn>1361-6463</eissn><coden>JPAPBE</coden><abstract>Determination and understanding of energy fluxes to nano- or microparticles, which are confined in process plasmas, is highly desirable because the energy balance results in an equilibrium particle temperature which may even initiate the crystallization of nanoparticles. A simple balance model has been used to estimate the energy fluxes between plasma and immersed particles on the basis of measured plasma parameters. Addition of molecular hydrogen to the argon plasma results in additional heating of the particles due to molecule recombination. The measured particle temperature is discussed with respect to appearing plasma–particle interactions which contribute to the particle's energy balance.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/0022-3727/44/17/174029</doi><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 0022-3727
ispartof Journal of physics. D, Applied physics, 2011-05, Vol.44 (17), p.174029
issn 0022-3727
1361-6463
language eng
recordid cdi_hal_primary_oai_HAL_hal_00613284v1
source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Nanocrystalline materials
Nanopowders
Nanoscale materials and structures: fabrication and characterization
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
title On the heating of nano- and microparticles in process plasmas
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T01%3A18%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-hal_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=On%20the%20heating%20of%20nano-%20and%20microparticles%20in%20process%20plasmas&rft.jtitle=Journal%20of%20physics.%20D,%20Applied%20physics&rft.au=Maurer,%20H%20R&rft.date=2011-05-04&rft.volume=44&rft.issue=17&rft.spage=174029&rft.pages=174029-&rft.issn=0022-3727&rft.eissn=1361-6463&rft.coden=JPAPBE&rft_id=info:doi/10.1088/0022-3727/44/17/174029&rft_dat=%3Chal_cross%3Eoai_HAL_hal_00613284v1%3C/hal_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true