Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics

Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries...

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Veröffentlicht in:Optics letters 2006-11, Vol.31 (21), p.3095-3097
Hauptverfasser: MORLENS, Anne-Sophie, GAUTIER, Julien, REY, Gilles, ZEITOUN, Philippe, CAUMES, Jean-Pascal, KOS-ROSSET, Marylène, MERDJI, Hamed, KAZAMIAS, Sophie, CASSOU, Kevin, FAJARDO, Marta
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Sprache:eng
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Zusammenfassung:Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.31.003095