Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics
Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries...
Gespeichert in:
Veröffentlicht in: | Optics letters 2006-11, Vol.31 (21), p.3095-3097 |
---|---|
Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally. |
---|---|
ISSN: | 0146-9592 1539-4794 |
DOI: | 10.1364/OL.31.003095 |