Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film

Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film

The reactions between HfCl2[N(SiMe3)(2)](2) and one or two equivalents of [(PrNC)-Pr-i(Me)(NPr)-Pr-i]Li and Pr-i-N=C=N-Pr-i, at room temperature in toluene, gave the novel chloroamido-amidinato-hafnium HfCl[N(SiMe3)(2)](2)[(PrNC)-Pr-i(Me)(NPr)-Pr-i] (1) and chloroamido-guanidinato-hafnium HfCl2[N(Si...

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Veröffentlicht in:Polyhedron 2010-08, Vol.29 (12), p.2522-2526
Hauptverfasser: Eleter, Mohamad, Hubert-Pfalzgraf, L.G., Daniele, Stéphane, Pilet, Guillaume, Tinant, Bernand
Format: Artikel
Sprache:eng
Schlagworte:
Catalysis
Chemical Sciences
Environment and Society
Environmental Sciences
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Zusammenfassung:The reactions between HfCl2[N(SiMe3)(2)](2) and one or two equivalents of [(PrNC)-Pr-i(Me)(NPr)-Pr-i]Li and Pr-i-N=C=N-Pr-i, at room temperature in toluene, gave the novel chloroamido-amidinato-hafnium HfCl[N(SiMe3)(2)](2)[(PrNC)-Pr-i(Me)(NPr)-Pr-i] (1) and chloroamido-guanidinato-hafnium HfCl2[N(SiMe3)(2)][(PrNC)-Pr-i(N (SiMe3)(2))N(i)Prl (2) compounds, respectively. Compounds 1 and 2 were characterized by NMR and X-ray single crystal diffraction analysis. Their reaction towards alcohol was studied in order to check the dependency between molecular structure and HfO2 Atomic Layer Deposition (ALD) specifications. (C) 2010 Elsevier Ltd. All rights reserved.
ISSN:0277-5387
0277-5387
DOI:10.1016/j.poly.2010.05.023