Is it possible to use external stress to tune silicon surface morphology?

Our goal was to check if an external mechanical stress can be used to control the morphology of a Si surface. We show that: (1) due to plastic relaxation, a mechanical stress does not allow destabilization of a flat silicon surface by means of the Asaro–Tiller–Grinfeld mechanism; (2) the faceting pe...

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Veröffentlicht in:Materials science in semiconductor processing 2009-02, Vol.12 (1), p.12-15
Hauptverfasser: Karashanova, D., Métois, J.J., Leroy, F., Müller, P.
Format: Artikel
Sprache:eng
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Zusammenfassung:Our goal was to check if an external mechanical stress can be used to control the morphology of a Si surface. We show that: (1) due to plastic relaxation, a mechanical stress does not allow destabilization of a flat silicon surface by means of the Asaro–Tiller–Grinfeld mechanism; (2) the faceting period of vicinal Si surfaces destabilized by electromigration is not influenced by mechanical stresses but becomes more defective; (3) anisotropic surface reconstructions can be modified by a mechanical stress whereas isotropic surfaces seem to be less sensitive.
ISSN:1369-8001
1873-4081
DOI:10.1016/j.mssp.2009.07.002