Silicon nanowires synthesis on a submicronic terminal: Structural and electrical characterization

In this work, we investigate localized silicon nanowires synthesis in a room temperature-controlled silane filled chamber using submicronic resistors as heating devices. These resistors consist in circuit-connected W wires obtained, on silicon oxide substrates, by focused ion beam induced deposition...

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Veröffentlicht in:	Journal of applied physics 2010-01, Vol.107 (2), p.024310-024310-5
Hauptverfasser:	Abed, Hichem, Sahaf, Houda, Reguer, Alan, Rochdi, Nabil, Tonneau, Didier, Bedu, Frederic, Dallaporta, Hervé, Jamgotchian, Haik
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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