Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator
A silicon technology sensor integrated in a micro-gripper is presented in this work. The force sensor consists of a monolithic silicon cantilever based structure. Forces applied on the cantilever are sensed by piezoresistive gauges in the clamping area and the resulting output voltage is measured by...
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Veröffentlicht in: | Sensors and actuators. A. Physical. 2006-01, Vol.128 (2), p.367-375 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A silicon technology sensor integrated in a micro-gripper is presented in this work. The force sensor consists of a monolithic silicon cantilever based structure. Forces applied on the cantilever are sensed by piezoresistive gauges in the clamping area and the resulting output voltage is measured by a Wheatstone bridge. Scaling of the proposed force sensor is done using analytical and numerical tools. The resulting force sensor enables the measurement of forces ranging from 1 to 600
mN with a resolution of 10
μN. Characterization of force sensors in the laboratory has confirmed the expected range of forces. The former sensor is next integrated in a piezoelectric micro-manipulator called micro-robot on chip (MOC). The aim of this integration is the measurement of handling forces during the manipulation of micro-samples in SEM and room conditions. Results from the characterization of silicon sensors show that a force range from 1 to 600
mN is measured. This range of forces can be adapted to the particular conditions of the MOC micro-manipulator. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2006.01.042 |