Characterization and fabrication of fully metal‐coated scanning near‐field optical microscopy SiO2 tips

Summary The fabrication of silicon cantilever‐based scanning near‐field optical microscope probes with fully aluminium‐coated quartz tips was optimized to increase production yield. Different cantilever designs for dynamic‐ and contact‐mode force feedback were implemented. Light transmission through...

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Veröffentlicht in:Journal of microscopy (Oxford) 2003-03, Vol.209 (3), p.182-187
Hauptverfasser: Aeschimann, L., Akiyama, T., Staufer, U., De Rooij, N. F., Thiery, L., Eckert, R., Heinzelmann, H.
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Sprache:eng
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Zusammenfassung:Summary The fabrication of silicon cantilever‐based scanning near‐field optical microscope probes with fully aluminium‐coated quartz tips was optimized to increase production yield. Different cantilever designs for dynamic‐ and contact‐mode force feedback were implemented. Light transmission through the tips was investigated experimentally in terms of the metal coating and the tip cone‐angle. We found that transmittance varies with the skin depth of the metal coating and is inverse to the cone angle, meaning that slender tips showed higher transmission. Near‐field optical images of individual fluorescing molecules showed a resolution
ISSN:0022-2720
1365-2818
DOI:10.1046/j.1365-2818.2003.01107.x