Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication

In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20 ns) and long (200 ns) pulse duration Excimer laser beams were used to deposit...

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Veröffentlicht in:	Applied surface science 2006-04, Vol.252 (13), p.4502-4505
Hauptverfasser:	Coutanson, S., Fogarassy, E., Venturini, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Excimer laser Physical radiation effects, radiation damage Physics Spin-on glass Structure of solids and liquids crystallography Ultraviolet, visible, and infrared radiation effects (including laser radiation) USJ fabrication
Online-Zugang:	Volltext
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