Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication
In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20 ns) and long (200 ns) pulse duration Excimer laser beams were used to deposit...
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| Veröffentlicht in: | Applied surface science 2006-04, Vol.252 (13), p.4502-4505 |
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| creator | Coutanson, S. Fogarassy, E. Venturini, J. |
| description | In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20
ns) and long (200
ns) pulse duration Excimer laser beams were used to deposit a large amount of energy in short time onto the near-surface region. Under suitable conditions, the irradiation leads to surface melting and dopant incorporation by liquid phase diffusion from the surface. Boron distribution profiles in the two-pulse duration regimes were studied as well as their electrical properties, and the junction formation of less than 25
nm in depth was demonstrated. |
| doi_str_mv | 10.1016/j.apsusc.2005.07.163 |
| format | Article |
| fullrecord | <record><control><sourceid>elsevier_hal_p</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_00089369v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0169433205014376</els_id><sourcerecordid>S0169433205014376</sourcerecordid><originalsourceid>FETCH-LOGICAL-c370t-c4e03fc65f5e7ac89c9351589a36a8d4c7608f8e85fa51ed2b6135db5e3794f83</originalsourceid><addsrcrecordid>eNp9kLFu3DAMhoWiBXpN-wYdtHTIYEeyLFtaCgRB0iS4okObWeDRUk4Hn2WIlyB5--jgoNmykAT5_ST4M_ZdiloK2Z3tapjpgbBuhNC16GvZqQ9sJU2vKq1N-5GtCmarVqnmM_tCtBNCNmW6Yv63xy1MkfbEYRo4zPMYEQ4xTTwFfth6fvmEce8zH4FKHNIcp3sectpzKmVVwPsyIk7pIaMnHlLmd39veYBNfl31lX0KMJL_9ppP2N3V5b-L62r959fNxfm6QtWLQ4WtFypgp4P2PaCxaJWW2lhQHZihxb4TJhhvdAAt_dBsOqn0sNFe9bYNRp2w02XvFkY357iH_OwSRHd9vnbHnhDCWNXZR1nYdmExJ6Lsw3-BFO5oq9u5xVZ3tNWJ3hVbi-zHIpuBEMaQYcJIb9reCisbXbifC-fLv4_RZ0cY_YR-iNnjwQ0pvn_oBXRAkCg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication</title><source>Elsevier ScienceDirect Journals</source><creator>Coutanson, S. ; Fogarassy, E. ; Venturini, J.</creator><creatorcontrib>Coutanson, S. ; Fogarassy, E. ; Venturini, J.</creatorcontrib><description>In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20
ns) and long (200
ns) pulse duration Excimer laser beams were used to deposit a large amount of energy in short time onto the near-surface region. Under suitable conditions, the irradiation leads to surface melting and dopant incorporation by liquid phase diffusion from the surface. Boron distribution profiles in the two-pulse duration regimes were studied as well as their electrical properties, and the junction formation of less than 25
nm in depth was demonstrated.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2005.07.163</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Exact sciences and technology ; Excimer laser ; Physical radiation effects, radiation damage ; Physics ; Spin-on glass ; Structure of solids and liquids; crystallography ; Ultraviolet, visible, and infrared radiation effects (including laser radiation) ; USJ fabrication</subject><ispartof>Applied surface science, 2006-04, Vol.252 (13), p.4502-4505</ispartof><rights>2005 Elsevier B.V.</rights><rights>2006 INIST-CNRS</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c370t-c4e03fc65f5e7ac89c9351589a36a8d4c7608f8e85fa51ed2b6135db5e3794f83</citedby><cites>FETCH-LOGICAL-c370t-c4e03fc65f5e7ac89c9351589a36a8d4c7608f8e85fa51ed2b6135db5e3794f83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2005.07.163$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>230,309,310,314,776,780,785,786,881,3536,23910,23911,25119,27903,27904,45974</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=17909125$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-00089369$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Coutanson, S.</creatorcontrib><creatorcontrib>Fogarassy, E.</creatorcontrib><creatorcontrib>Venturini, J.</creatorcontrib><title>Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication</title><title>Applied surface science</title><description>In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20
ns) and long (200
ns) pulse duration Excimer laser beams were used to deposit a large amount of energy in short time onto the near-surface region. Under suitable conditions, the irradiation leads to surface melting and dopant incorporation by liquid phase diffusion from the surface. Boron distribution profiles in the two-pulse duration regimes were studied as well as their electrical properties, and the junction formation of less than 25
nm in depth was demonstrated.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Exact sciences and technology</subject><subject>Excimer laser</subject><subject>Physical radiation effects, radiation damage</subject><subject>Physics</subject><subject>Spin-on glass</subject><subject>Structure of solids and liquids; crystallography</subject><subject>Ultraviolet, visible, and infrared radiation effects (including laser radiation)</subject><subject>USJ fabrication</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kLFu3DAMhoWiBXpN-wYdtHTIYEeyLFtaCgRB0iS4okObWeDRUk4Hn2WIlyB5--jgoNmykAT5_ST4M_ZdiloK2Z3tapjpgbBuhNC16GvZqQ9sJU2vKq1N-5GtCmarVqnmM_tCtBNCNmW6Yv63xy1MkfbEYRo4zPMYEQ4xTTwFfth6fvmEce8zH4FKHNIcp3sectpzKmVVwPsyIk7pIaMnHlLmd39veYBNfl31lX0KMJL_9ppP2N3V5b-L62r959fNxfm6QtWLQ4WtFypgp4P2PaCxaJWW2lhQHZihxb4TJhhvdAAt_dBsOqn0sNFe9bYNRp2w02XvFkY357iH_OwSRHd9vnbHnhDCWNXZR1nYdmExJ6Lsw3-BFO5oq9u5xVZ3tNWJ3hVbi-zHIpuBEMaQYcJIb9reCisbXbifC-fLv4_RZ0cY_YR-iNnjwQ0pvn_oBXRAkCg</recordid><startdate>20060430</startdate><enddate>20060430</enddate><creator>Coutanson, S.</creator><creator>Fogarassy, E.</creator><creator>Venturini, J.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope></search><sort><creationdate>20060430</creationdate><title>Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication</title><author>Coutanson, S. ; Fogarassy, E. ; Venturini, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c370t-c4e03fc65f5e7ac89c9351589a36a8d4c7608f8e85fa51ed2b6135db5e3794f83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Exact sciences and technology</topic><topic>Excimer laser</topic><topic>Physical radiation effects, radiation damage</topic><topic>Physics</topic><topic>Spin-on glass</topic><topic>Structure of solids and liquids; crystallography</topic><topic>Ultraviolet, visible, and infrared radiation effects (including laser radiation)</topic><topic>USJ fabrication</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Coutanson, S.</creatorcontrib><creatorcontrib>Fogarassy, E.</creatorcontrib><creatorcontrib>Venturini, J.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Coutanson, S.</au><au>Fogarassy, E.</au><au>Venturini, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication</atitle><jtitle>Applied surface science</jtitle><date>2006-04-30</date><risdate>2006</risdate><volume>252</volume><issue>13</issue><spage>4502</spage><epage>4505</epage><pages>4502-4505</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20
ns) and long (200
ns) pulse duration Excimer laser beams were used to deposit a large amount of energy in short time onto the near-surface region. Under suitable conditions, the irradiation leads to surface melting and dopant incorporation by liquid phase diffusion from the surface. Boron distribution profiles in the two-pulse duration regimes were studied as well as their electrical properties, and the junction formation of less than 25
nm in depth was demonstrated.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2005.07.163</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 0169-4332 |
| ispartof | Applied surface science, 2006-04, Vol.252 (13), p.4502-4505 |
| issn | 0169-4332 1873-5584 |
| language | eng |
| recordid | cdi_hal_primary_oai_HAL_hal_00089369v1 |
| source | Elsevier ScienceDirect Journals |
| subjects | Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Excimer laser Physical radiation effects, radiation damage Physics Spin-on glass Structure of solids and liquids crystallography Ultraviolet, visible, and infrared radiation effects (including laser radiation) USJ fabrication |
| title | Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-23T11%3A13%3A22IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-elsevier_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Mechanisms%20and%20application%20of%20the%20Excimer%20laser%20doping%20from%20spin-on%20glass%20sources%20for%20USJ%20fabrication&rft.jtitle=Applied%20surface%20science&rft.au=Coutanson,%20S.&rft.date=2006-04-30&rft.volume=252&rft.issue=13&rft.spage=4502&rft.epage=4505&rft.pages=4502-4505&rft.issn=0169-4332&rft.eissn=1873-5584&rft_id=info:doi/10.1016/j.apsusc.2005.07.163&rft_dat=%3Celsevier_hal_p%3ES0169433205014376%3C/elsevier_hal_p%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_els_id=S0169433205014376&rfr_iscdi=true |