AFM interlaboratory comparison for nanodimensional metrology on silicon nanowires

Silicon nanowires (NWs) with a cylindrical form are fabricated by means of nanosphere lithography and metal-assisted chemical etching to obtain high aspect ratio nanostructures (diameter of about 100 nm and length of more than 15 µm) on an approximately 1 cm 2 area. The nanodimensional characterizat...

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Veröffentlicht in:	Measurement science & technology 2024-10, Vol.35 (10), p.105014
Hauptverfasser:	Ribotta, Luigi, Delvallée, Alexandra, Cara, Eleonora, Bellotti, Roberto, Giura, Andrea, Carlo, Ivan De, Fretto, Matteo, Knulst, Walter, Koops, Richard, Torre, Bruno, Saghi, Zineb, Boarino, Luca
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Micro and nanotechnologies Microelectronics
Online-Zugang:	Volltext
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