Integrated spectrometer and integrated detectors on silicon-on-insulator for short-wave infrared applications

Integrated spectrometer and integrated detectors on silicon-on-insulator for short-wave infrared applications

We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 mu m. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted G...

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Hauptverfasser: Ryckeboer, Eva, Gassenq, Alban, Hattasan, Nannicha, Kuyken, Bart, Cerutti, L, Rodriguez, JB, Tournie, E, Roelkens, Günther, Bogaerts, Wim, Baets, Roel
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Technology and Engineering
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Zusammenfassung:We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 mu m. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted GaInAsSb photodiodes for future implementation as detector array.