An ultrasonic laser sonar technique for copper damascene CMP metrology
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| Veröffentlicht in: | Solid state technology 2001-02, Vol.44 (2), p.67 |
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| Format: | Magazinearticle |
| Sprache: | eng |
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| container_issue | 2 |
| container_start_page | 67 |
| container_title | Solid state technology |
| container_volume | 44 |
| creator | Colgan, Michael Morath, Chris Tas, Guray Grief, Malcolm |
| description | |
| format | Magazinearticle |
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| fulltext | fulltext |
| identifier | ISSN: 0038-111X |
| ispartof | Solid state technology, 2001-02, Vol.44 (2), p.67 |
| issn | 0038-111X |
| language | eng |
| recordid | cdi_gale_infotracmisc_A71326955 |
| source | EBSCOhost Business Source Complete |
| title | An ultrasonic laser sonar technique for copper damascene CMP metrology |
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