Ion-plasma treatment of reed switch contacts: A study by time-of-flight secondary ion mass spectrometry

A TOF.SIMS-5 time-of-flight secondary ion mass spectrometer operating with pulsed 25-keV Bi + ions for analysis and 2-keV Cs + ions for sputter ion-beam etching was employed for studying the near-surface composition of iron-nickel (permalloy) contacts (blades) after the treatment in pulsed nitrogen plasma directly in hermetically sealed reed switches. The formation of 20- to 25-nm thick oxynitride coatings in the contacting region of the blades was observed. It was found that this coating was of the diffusive nature and produced via the plasma nitriding of the contacts.